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SFT Pnuematic Series
The SFT series of shock-resistant active vibration isolators use pneumatic isolators as the main support in the vertical direction.
Product Model:
SFT180F Vibration Damping
SFT130C Vibration Damping
SFT080A Vibration Damping
SFT060A Vibration Damping
SFT040A Vibration Damping
SFT030B Vibration Damping
Introduction:
The SFT series of shock-resistant active vibration isolators use pneumatic isolators as the main support in the vertical direction. In the horizontal direction, they employ a mechanical inverted pendulum negative stiffness mechanism in parallel with a positive stifiness mechanism. Combined with active vibration control and precise positioning control in both the vertical and horizontal directions, the system achieves high-performance active vibration isolation and stabilization across six degrees of freedom. This design meets the high-performance vibration isolation and shock resistance stability requirements for a wide range of equipment used in back-end packaging, semiconductor inspection and metrology applications.
Features:
● Pneumatic Air Sping as Main Support
● Active Vibration Control and Precision Positioning Control
● High-Performance Vibration lsolation and Impact Resistance
● Mechanical Inverted Pendulum Negative Stiffness Mechanism in Parallel with Positive Stiffness
● Meets High-Performance Vibration lsolation and Shock Resistance Stability Requirements
● Application Fields: Back-End Packaging. Semiconductor inspection, Metrology, Etc
Specifications:
|
Model |
SFT180F |
SFT130C |
SFT080A |
|
Max Load Capacity With 4 Isolators |
4500~7200 kg |
3500~5200 kg |
2400~3200 kg |
|
Isolator Dimensions |
380*370*260（L*W*H mm） |
260*260*259（L*W*H mm） |
308*300*202（L*W*H mm） |
|
Isolator Weight |
≤58kg |
≤26kg |
≤32kg |
|
Transmissibility |
≤-10dB@1Hz，≤-20dB@2Hz，≤-25dB@5Hz，≤-35dB@10Hz，≤-40dB@20Hz |
≤-5dB@1Hz，≤-15dB@2Hz，≤-25dB@5Hz，≤-35dB@10Hz |
≤-10dB@1Hz，≤-15dB@2Hz，≤-25dB@5Hz，≤-35dB@10Hz |
|
Horizontal Actuator Force per Isolator |
135N |
130N |
320N |
|
Vertical Actuator Force per Isolator |
135N |
130N |
320N |
|
Max System Power |
400W |
400W |
700W |
|
Passive Element |
Pneumatic Air Sping |
||
|
Degrees of Freedom |
6 |
||
|
Active Isolation Range |
0.8 ~ 150Hz |
||
|
Position Stability |
≤±8μm |
||
|
Model |
SFT060A |
SFT040A |
SFT030B |
|
Max Load Capacity With 4 Isolators |
1600~2400 kg |
1000~1600 kg |
600~1200 kg |
|
Isolator Dimensions |
308*300*202（L*W*Hmm） |
225*185*202（L*W*Hmm） |
210*210*185（L*W*Hmm） |
|
Isolator Weight |
≤38kg |
≤17kg |
≤20kg |
|
Horizontal Actuator Force per Isolator |
320N |
40N |
135N |
|
Vertical Actuator Force per Isolator |
320N |
40N |
135N |
|
Max System Power |
700W |
400W |
400W |
|
Passive Element |
Pneumatic Air Sping |
||
|
Degrees of Freedom |
6 |
||
|
Active Isolation Range |
0.8 ~ 150Hz |
||
|
Transmissibility |
≤-10dB@1Hz，≤-15dB@2Hz，≤-25dB@5Hz，≤-35dB@10Hz |
||
|
Position Stability |
≤±8μm |
||
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