SFT Pnuematic Series

Product Model:

SFT180F Vibration Damping

SFT130C Vibration Damping

SFT080A Vibration Damping

SFT060A Vibration Damping

SFT040A Vibration Damping

SFT030B Vibration Damping

Introduction:

The SFT series of shock-resistant active vibration isolators use pneumatic isolators as the main support in the vertical direction. In the horizontal direction, they employ a mechanical inverted pendulum negative stiffness mechanism in parallel with a positive stifiness mechanism. Combined with active vibration control and precise positioning control in both the vertical and horizontal directions, the system achieves high-performance active vibration isolation and stabilization across six degrees of freedom. This design meets the high-performance vibration isolation and shock resistance stability requirements for a wide range of equipment used in back-end packaging, semiconductor inspection and metrology applications.

Features:

● Pneumatic Air Sping as Main Support

● Active Vibration Control and Precision Positioning Control

● High-Performance Vibration lsolation and Impact Resistance

● Mechanical Inverted Pendulum Negative Stiffness Mechanism in Parallel with Positive Stiffness

● Meets High-Performance Vibration lsolation and Shock Resistance Stability Requirements

● Application Fields: Back-End Packaging. Semiconductor inspection, Metrology, Etc

Specifications:

Model	SFT180F	SFT130C	SFT080A
Max Load Capacity With 4 Isolators	4500~7200 kg	3500~5200 kg	2400~3200 kg
Isolator Dimensions	380370260（LWH mm）	260260259（LWH mm）	308300202（LWH mm）
Isolator Weight	≤58kg	≤26kg	≤32kg
Transmissibility	≤-10dB@1Hz，≤-20dB@2Hz，≤-25dB@5Hz，≤-35dB@10Hz，≤-40dB@20Hz	≤-5dB@1Hz，≤-15dB@2Hz，≤-25dB@5Hz，≤-35dB@10Hz	≤-10dB@1Hz，≤-15dB@2Hz，≤-25dB@5Hz，≤-35dB@10Hz
Horizontal Actuator Force per Isolator	135N	130N	320N
Vertical Actuator Force per Isolator	135N	130N	320N
Max System Power	400W	400W	700W
Passive Element	Pneumatic Air Sping
Degrees of Freedom	6
Active Isolation Range	0.8 ~ 150Hz
Position Stability	≤±8μm

Model	SFT060A	SFT040A	SFT030B
Max Load Capacity With 4 Isolators	1600~2400 kg	1000~1600 kg	600~1200 kg
Isolator Dimensions	308300202（LWHmm）	225185202（LWHmm）	210210185（LWHmm）
Isolator Weight	≤38kg	≤17kg	≤20kg
Horizontal Actuator Force per Isolator	320N	40N	135N
Vertical Actuator Force per Isolator	320N	40N	135N
Max System Power	700W	400W	400W
Passive Element	Pneumatic Air Sping
Degrees of Freedom	6
Active Isolation Range	0.8 ~ 150Hz
Transmissibility	≤-10dB@1Hz，≤-15dB@2Hz，≤-25dB@5Hz，≤-35dB@10Hz
Position Stability	≤±8μm

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